Omron MEMS Pressure Sensor 2SMPP

Omron is a world leader in the Blood Pressure Monitor market with more then 100 Million unit mark in sales of their home-use monitors. Contributing to this success is the use of MEMS Pressure Sensors.

In 1996, Omron released its first MEMS Capacitive Type Pressure Sensor, made on 4” MEMS wafers. With a reduced MEMS element size (2.2 x 1.7 x 0.8 mm), their 2001 capacitive model made use of 5” wafer technology. Utilizing MEMS dry etching technology and CMOS process integration, Omron began manufacturing a new Piezo Resistive type of Pressure Sensor more then 1 year ago, utilizing state-of-the-art 8”/0.35 mm wafer production. This sensor features a significant reduction in the MEMS chip size (1.3 x 1.3 x 0.4 mm), though the package size was maintained at 9.85 x 4.75 x 8.25 mm to facilitate an easy transition between the two models.

The new Gauge Piezo Type MEMS Pressure Sensor offers precise measurement in range up to 37kPa with reduced offset voltage and span dispersions of ±4.0 mV and 3.1 mV, which makes trimming unnecessary. A lower power consumption of 0.2mW provides significant energy savings. The specifications include a non-linearity of <0.8% F.S. and a hysteresis of 0.5% F.S. Another outstanding feature is low temperature influence span of +/-1% F.S. and offset of +/-3% F.S.

In addition to medical equipment, potential applications include leak detection, pressure indicators, air movement control, level indicators, industrial controls, environmental controls and home appliances such as vacuums.

Looking forward, Omron is currently finishing development of an Absolute pressure sensor to detect changes in elevation or Piezo Monolithic pressure sensor that integrate the signal amplification onto the MEMS chip, simplifying the customer’s integration process.